[EN] PROCESS FOR MANUFACTURE OF SEMICONDUCTOR DEVICES<br/>[FR] PROCÉDÉ POUR LA FABRICATION DE DISPOSITIFS À SEMI-CONDUCTEUR
申请人:BASF SE
公开号:WO2013168047A1
公开(公告)日:2013-11-14
A process for the manufacture of semiconductor devices is provided. The process comprises the chemical-mechanical polishing of a substrate or layer containing at least one III-V material in the presence of a chemical-mechanical polishing composition (Q1) comprising (A) inorganic particles, organic particles, or a mixture or composite thereof, (B) a polymer comprising at least one N-heterocycle, and (M) an aqueous medium and whereas Q1 has a pH of from 1.5 to 4.5.