申请人:Rohm and Haas Electronic Materials, LLC
公开号:US20160168117A1
公开(公告)日:2016-06-16
Acid generators comprising a carbocyclic aryl or heteroaromatic group substituted with at least one acetate moiety are provided. These acid generators are particularly useful as a photoresist composition component.
本发明提供了一种包括至少一个醋酸基团取代的碳环芳基或杂环芳基的酸发生剂。这些酸发生剂作为光刻胶组分特别有用。