Disclosed is a resist composition including a compound represented by formula (I), a resin having an acid-labile group and an acid generator, the resin having an acid-labile group including at least one selected from the group consisting of a structural unit represented by formula (a1-1) and a structural unit represented by formula (a1-2):
揭示了一种耐受组合物,包括由式(I)表示的化合物、具有酸敏基团和酸发生剂的
树脂,其中具有酸敏基团的
树脂包括至少从以下组中选择的一种:由式(a1-1)表示的结构单元和由式(a1-2)表示的结构单元。