The present invention provides a cross-linking agent capable of preventing formation of scum from a bottom anti-reflective coating, and also provides a composition for forming a bottom anti-reflection coating containing the agent. The cross-linking agent is a nitrogen-containing aromatic compound having at least one vinyloxy group or N-methoxymethylamide group, and the composition contains the cross-linking agent. The cross-linking agent of the formula (1) can be produced by reaction of a nitrogen-containing aromatic compound, a halogen compound having a vinyloxy group or N-methoxymethylamide group and a basic compound.
该发明提供了一种
交联剂,能够防止底部抗反射涂层形成浮渣,并提供了一种含有该剂的底部抗反射涂层形成组合物。该
交联剂是一种含有至少一个
乙烯氧基团或N-甲
氧甲基酰胺基团的含
氮芳香化合物,该组合物含有该
交联剂。式(1)的
交联剂可通过含
氮芳香化合物、具有
乙烯氧基团或N-甲
氧甲基酰胺基团的卤素化合物以及碱性化合物的反应制备。