申请人:Rohm and Haas Electronic Materials LLC
公开号:US20160103392A1
公开(公告)日:2016-04-14
A photoresist composition includes a first polymer in which at least half of the repeat units are photoacid-generating repeat units, and a second polymer that exhibits a change in solubility in an alkali developer under the action of acid. In the first polymer, each of the photoacid-generating repeat units comprises photoacid-generating functionality and base-solubility-enhancing functionality.
一种光阻组合物包括第一聚合物,其中至少一半的重复单元是光酸发生重复单元,并且第二聚合物在酸的作用下在碱性显影剂中表现出溶解度的变化。在第一聚合物中,每个光酸发生重复单元都包括光酸发生性能和碱溶性增强性能。