A method for forming a film for the fabrication of a microelectronic or optoelectronic device comprising a series of diazirine compounds of formula (I) having utility as photocrosslinkers are disclosed.
Where, A, L, z, Arx and Ry are as defined herein.
本发明公开了一种用于制造微电子或光电器件薄膜的方法,该薄膜由一系列可用作光
交联剂的式 (I) 重氮化合物组成。
其中,A、L、z、Arx 和 Ry 如本文所定义。