Provided are a curable composition for imprinting and a cured product, a pattern forming method, and a lithography method in which the curable composition for imprinting is used, the curable composition having excellent resolution ability, filling properties into a mold, and releasability from a mold in a case where a fine pattern having a size of 20 nm or less is prepared. The curable composition for imprinting includes: a monofunctional polymerizable compound; a bifunctional polymerizable compound; and a photopolymerization initiator, in which a content of the monofunctional polymerizable compound is 5 to 30 mass % with respect to a content of all the polymerizable compounds, a content of the bifunctional polymerizable compound is 70 mass % or higher with respect to a content of all the polymerizable compounds, at least one bifunctional polymerizable compound is a bifunctional polymerizable compound in which the number of atoms linking two polymerizable groups to each other is 2 or less, and a content of a bifunctional polymerizable compound that does not include an alicyclic structure and an aromatic ring structure and in which the number of atoms linking two polymerizable groups to each other is 3 or more is 30 mass % or lower with respect to the content of all the polymerizable compounds.
本发明提供了一种压印用可固化组合物和固化产品、一种图案形成方法以及一种光刻方法,其中使用了该压印用可固化组合物,该可固化组合物在制备尺寸为 20 nm 或更小的精细图案的情况下,具有出色的解析能力、对模具的填充性能以及从模具的脱模性。用于压印的可固化组合物包括单官能团可聚合化合物; 双官能团可聚合化合物;和光聚合
引发剂,其中单官能团可聚合化合物的含量占所有可聚合化合物含量的 5% 至 30%,双官能团可聚合化合物的含量占所有可聚合化合物含量的 70% 或更高、至少一种双官能团可聚合化合物是连接两个可聚合基团的原子数为 2 个或更少 的双官能团可聚合化合物,且不包括脂环结构和芳香环结构且连接两个可聚合基团 的原子数为 3 个或更多的双官能团可聚合化合物的含量相对于所有可聚合化合物的 含量为 30 质量%或更低。