Self-imageable film forming polymer, compositions thereof and devices and structures made therefrom
申请人:Onishi Osamu
公开号:US20110104614A1
公开(公告)日:2011-05-05
Embodiments in accordance with the present invention encompass self-imageable film forming compositions that comprise norbornene-type polymers and that can be formulated to be either positive tone imaging or negative tone. The films formed thereby are useful in the forming of microelectronic and optoelectronics devices.