Photopatternable Compositions and Methods of Fabricating Transistor Devices Using Same
申请人:Flexterra, Inc.
公开号:US20170227846A1
公开(公告)日:2017-08-10
The present teachings relate to compositions for forming a negative-tone photopatternable dielectric material, where the compositions include, among other components, an organic filler and one or more photoactive compounds, and where the presence of the organic filler enables the effective removal of such photoactive compounds (after curing, and during or after the development step) which, if allowed to remain in the photopatterned dielectric material, would lead to deleterious effects on its dielectric properties.