Acid generators comprising a carbocyclic aryl or heteroaromatic group substituted with at least one acetate moiety are provided. These acid generators are particularly useful as a photoresist composition component.
提供了由至少一个
乙酸基取代的
碳环芳基或杂芳基组成的酸生成物。这些酸生成物作为光刻胶组合物成分特别有用。