A crosslinkable polymer comprising: a first unit of the following general formula (I-A) or (I-B):
wherein: P is a polymerizable functional group; L is a single bond or an m+1-valent linking group; X
1
is a monovalent electron donating group; X
2
is a divalent electron donating group; Ar
1
and Ar
2
are trivalent and divalent aryl groups, respectively, and carbon atoms of the cyclobutene ring are bonded to adjacent carbon atoms on the same aromatic ring of Ar
1
or Ar
2
; m and n are each an integer of 1 or more; and each R
1
is independently a monovalent group; and a second unit chosen from general formulae (III) and (IV):
wherein R
7
is chosen from hydrogen, fluorine, C
1
-C
3
alkyl and C
1
-C
3
fluoroalkyl, R
8
is chosen from optionally substituted C
1
to C
10
alkyl, and Ar
3
is an optionally substituted aryl group. Underlayer compositions comprise the crosslinkable polymer and a solvent. The crosslinkable polymers and underlayer compositions find particular applicability in the manufacture of semiconductor devices or data storage devices for the formation of high resolution patterns.
一种可交联聚合物,包括以下第一单元的一般式(I-A)或(I-B):其中:P是聚合官能团;L是单键或m+1价连接基团;X1是单价电子供体基团;X2是双价电子供体基团;Ar1和Ar2分别是三价和二价芳基基团,
环丁烯环上的碳原子与Ar1或Ar2的同一芳环上的相邻碳原子相键合;m和n均为1或更多的整数;每个R1独立地是单价基团;以及从一般式(III)和(IV)中选择的第二单元:其中R7选择自氢、
氟、C1-C3烷基和C1-C3氟烷基,R8选择自可选取代的C1至C10烷基,而Ar3是可选取代的芳基基团。底层组成物包括可交联聚合物和溶剂。该可交联聚合物和底层组成物在制造半导体器件或数据存储器件的高分辨率图案形成中具有特定的适用性。