The present invention provides a silicone skeleton-containing polymer compound containing a repeating unit shown by the general formula (1) and having a weight average molecular weight of 3,000 to 500,000. There can be provided a silicone skeleton-containing polymer compound suitable used as a base resin of a chemically amplified negative resist composition that can remedy the problem of delamination generated on a metal wiring such as Cu and Al, an electrode, and a substrate, especially on a substrate such as SiN, and can form a fine pattern without generating a scum and a footing profile in the pattern bottom and on the substrate when the widely used 2.38% TMAH aqueous solution is used as a developer.
本发明提供了一种含有机
硅骨架的聚合物化合物,该化合物含有通式(1)所示的重复单元,其重量平均分子量为 3,000 至 500,000。本发明提供了一种含有机
硅骨架的聚合物化合物,适合用作
化学放大负型抗蚀剂组合物的基体
树脂,该化合物可以解决在
铜和铝等
金属配线、电极和基板上,特别是在
氮化硅等基板上产生的分层问题,并且在使用广泛使用的 2.38% TMAH
水溶液作为显影剂时,可以形成精细图案,而不会在图案底部和基板上产生浮渣和脚底轮廓。