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ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE RESIN COMPOSITION, ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE FILM, MASK BLANK PROVIDED WITH ACTINIC RAY-SENSITIVE OR RADIATION-SENSITIVE FILM, PATTERN FORMING METHOD, METHOD FOR MANUFACTURING ELECTRONIC DEVICE, ELECTRONIC DEVICE, AND COMPOUND
申请人:FUJIFILM Corporation
公开号:US20160280675A1
公开(公告)日:2016-09-29
The actinic ray-sensitive or radiation-sensitive resin composition includes a crosslinking agent having a polarity converting group and an alkali-soluble resin, in which the polarity converting group is a group capable of decomposing by the action of an alkaline aqueous solution to generate a carboxylic acid or sulfonic acid on the side having a crosslinking group.
感光
树脂或辐射敏感
树脂组合物包括具有极性转换基团和可溶于碱性
树脂的
交联剂,其中极性转换基团是一种能够通过碱性
水溶液作用分解并在具有交联基团的侧面生成
羧酸或
磺酸的基团。
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Actinic ray-sensitive or radiation-sensitive resin composition, actinic ray-sensitive or radiation-sensitive film, mask blank provided with actinic ray-sensitive or radiation-sensitive film, pattern forming method, method for manufacturing electronic device, electronic device, and compound
申请人:FUJIFILM Corporation
公开号:US10011576B2
公开(公告)日:2018-07-03
The actinic ray-sensitive or radiation-sensitive resin composition includes a crosslinking agent having a polarity converting group and an alkali-soluble resin, in which the polarity converting group is a group capable of decomposing by the action of an alkaline aqueous solution to generate a carboxylic acid or sulfonic acid on the side having a crosslinking group.
光敏或辐射敏感
树脂组合物包括具有极性转换基团的
交联剂和碱溶性
树脂,其中极性转换基团是能够在碱性
水溶液作用下分解的基团,在具有交联基团的一侧生成
羧酸或
磺酸。
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ACTINIC-RAY- OR RADIATION-SENSITIVE RESIN COMPOSITION, ACTINIC-RAY- OR RADIATION-SENSITIVE FILM, MASK BLANK AND METHOD OF FORMING PATTERN
申请人:FUJIFILM Corporation
公开号:US20140242502A1
公开(公告)日:2014-08-28
According to one embodiment, an actinic-ray- or radiation-sensitive resin composition includes a compound (A) that contains a structure (P) containing at least one phenolic hydroxyl group and a structure (Q) containing at least one phenolic hydroxyl group whose hydrogen atom is replaced by a group (S) with a cyclic structure containing an acid crosslinking group, characterized in that the group (S) with a cyclic structure containing an acid crosslinking group is a group with a polycyclic structure or a group with a cyclic structure containing a hydroxymethyl group and/or an alkoxymethyl group.
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CHEMICAL AMPLIFICATION RESIST COMPOSITION, RESIST FILM USING THE SAME, RESIST-COATED MASK BLANK, METHOD OF FORMING PHOTOMASK AND PATTERN, AND METHOD OF MANUFACTURING ELECTRONIC DEVICE AND ELECTRONIC DEVICE
申请人:FUJIFILM CORPORATION
公开号:US20150072274A1
公开(公告)日:2015-03-12
A chemical amplification resist composition according to the present invention includes (A) a compound including a triarylsulfonium cation having one or more fluorine atoms and capable of generating an acid with a volume of 240 Å
3
or higher by irradiation of active rays or radiation; and (B) a compound including a phenolic hydroxyl group.
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RESIN COMPOSITION AND PATTERN FORMING METHOD USING THE SAME
申请人:FUJIFILM Corporation
公开号:US20150118623A1
公开(公告)日:2015-04-30
A resin composition of the present invention includes a polymer compound (A) containing a repeating unit (Q) represented by the following general formula (1):
wherein
R
1
represents a hydrogen atom, a methyl group, or a halogen atom;
R
2
and R
3
represent a hydrogen atom, an alkyl group, or a cycloalkyl group;
L represents a divalent linking group or a single bond;
Y represents a substituent excluding a methylol group;
Z represents a hydrogen atom or a substituent;
m represents an integer of 0 to 4;
n represents an integer of 1 to 5; and
m+n is 5 or less.