METHOD OF PRODUCING STRUCTURE CONTAINING PHASE-SEPARATED STRUCTURE, METHOD OF FORMING PATTERN AND METHOD OF FORMING FINE PATTERN
申请人:Tokyo Ohka Kogyo Co., Ltd.
公开号:US20150034593A1
公开(公告)日:2015-02-05
A method of producing a structure containing a phase-separated structure, including: forming a layer including a neutralization film on a substrate; forming a layer containing a block copolymer on the layer including the neutralization film, the P
A
block and P
B
block being mutually bonded in the block copolymer, and the P
B
block including a structural unit other than a structural unit constituting the P
A
block; and subjecting the layer containing the block copolymer to an annealing treatment, such that, in the case where a surface free energy of the P
A
block, a surface free energy of the P
B
block and a surface free energy of the neutralization film are represented by a coordinate point A of the P
A
block, a coordinate point B of the P
B
block and a coordinate point N of the neutralization film, respectively in the plane of coordinates, the coordinate point N of the neutralization film is within the predetermined range.