申请人:ROHM AND HAAS ELECTRONIC MATERIALS LLC
公开号:US20220214616A1
公开(公告)日:2022-07-07
A photoresist composition, comprising a first polymer comprising a first repeating unit comprising an acid-labile group, and a second polymer comprising a repeating unit derived from one or more monomers of formula (4); a photoacid generator; and a solvent,
wherein Z
1
, Z
2
, R
1
, R
2
, and L are as described herein, and P is a polymerizable group.