Imide Compound and Chemically Amplified Resist Composition Containing The Same
申请人:TAKEMOTO Ichiki
公开号:US20100028807A1
公开(公告)日:2010-02-04
An imide compound represented by the formula (I):
wherein R
1
represents a C1-C20 aliphatic hydrocarbon group etc., W
1
represents —CO—O— etc., Q
1
and Q
2
each independently represent a fluorine atom etc., and A represents a group represented by the formula (I-1):
wherein A
1
represents —CH
2
—CH
2
— etc., and a chemically amplified resist composition containing the same.
US8329377B2
申请人:——
公开号:US8329377B2
公开(公告)日:2012-12-11
LAPSZEWICZ, J.;LANGE, J.;MAZUR, W., ACTA POL. PHARM., 1981, 38, N 3, 269-274
作者:LAPSZEWICZ, J.、LANGE, J.、MAZUR, W.
DOI:——
日期:——
LANGE J.; ILCZUK I.; LAPSZEWICZ J.; RABSZTYN T.; WALCZYNA K., PHARMAZIE <PHAR-AT>, 1977, 32, NO 10, 579-581
作者:LANGE J.、 ILCZUK I.、 LAPSZEWICZ J.、 RABSZTYN T.、 WALCZYNA K.