Molecular Resist Compositions, Methods of Patterning Substrates Using the Compositions and Process Products Prepared Therefrom
申请人:MCLELLAN Joseph M.
公开号:US20090311484A1
公开(公告)日:2009-12-17
The present invention is directed to molecular resist compositions comprising an organic amine, methods of forming features on substrates using the molecular resists compositions and process products prepared therefrom.