[EN] SULFONIC DERIVATIVE COMPOUNDS AS PHOTOACID GENERATORS IN RESIST APPLICATIONS [FR] COMPOSÉS DÉRIVÉS SULFONIQUES UTILISÉS EN TANT QUE PHOTOGÉNÉRATEURS D'ACIDES DANS DES APPLICATIONS DE PHOTORÉSINE
[EN] SULFONIC DERIVATIVE COMPOUNDS AS PHOTOACID GENERATORS IN RESIST APPLICATIONS [FR] COMPOSÉS DÉRIVÉS SULFONIQUES UTILISÉS EN TANT QUE PHOTOGÉNÉRATEURS D'ACIDES DANS DES APPLICATIONS DE PHOTORÉSINE
[EN] SULFONIC DERIVATIVE COMPOUNDS AS PHOTOACID GENERATORS IN RESIST APPLICATIONS<br/>[FR] COMPOSÉS DÉRIVÉS SULFONIQUES UTILISÉS EN TANT QUE PHOTOGÉNÉRATEURS D'ACIDES DANS DES APPLICATIONS DE PHOTORÉSINE
申请人:HERAEUS PRECIOUS METALS NORTH AMERICA DAYCHEM LLC
公开号:WO2016043941A1
公开(公告)日:2016-03-24
Novel photoacid generator compounds are provided. Photoresist compositions that include the novel photoacid generator compounds are also provided. The invention further provides methods of making and using the photoacid generator compounds and photoresist compositions disclosed herein. The compounds and compositions are useful as photoactive components in chemically amplified resist compositions for various microfabrication applications.