[EN] ZIRCONIUM-CONTAINING PRECURSORS FOR VAPOR DEPOSITION<br/>[FR] PRÉCURSEURS CONTENANT DU ZIRCONIUM POUR LE DÉPÔT EN PHASE VAPEUR
申请人:AIR LIQUIDE
公开号:WO2013177269A2
公开(公告)日:2013-11-28
Disclosed are zirconium-containing precursors and methods of synthesizing the same. The precursors may be used to deposit zirconium oxide, zirconium silicon oxide and zirconium-metal oxide containing layers using vapor deposition methods such as chemical vapor deposition or atomic layer deposition.