An object of the present invention is to provide an actinic ray-sensitive or radiation-sensitive resin composition, in which the cross-sectional shape of a pattern thus formed has excellent rectangularity and a dimensional variation of the line width of the pattern thus formed hardly occurs even over time after preparation. Furthermore, another object of the present invention is to provide a resist film, a pattern forming method, and a method for manufacturing an electronic device, each using the actinic ray-sensitive or radiation-sensitive resin composition.
The actinic ray-sensitive or radiation-sensitive resin composition of an embodiment of the present invention includes a resin having a polarity that increases through decomposition by an action of an acid, a compound that generates an acid upon irradiation with actinic rays or radiation, and a halogen-based solvent, in which a content of the halogen-based solvent is from 1 ppb by mass to 50 ppm by mass with respect to a total mass of the composition.
本发明的一个目的是提供一种对辐射线敏感或辐射敏感的
树脂组合物,在这种组合物中,由此形成的图案的横截面形状具有极佳的矩形性,而且由此形成的图案的线宽即使在制备后一段时间内也几乎不会发生尺寸变化。此外,本发明的另一个目的是提供一种抗蚀剂薄膜、一种图案形成方法和一种制造电子设备的方法,每种方法都使用了对放 射线敏感或对辐射敏感的
树脂组合物。
本发明一个实施例中的对放 射线敏感或对辐射敏感的
树脂组合物包括极性在酸的作用下分解而增加的
树脂、在放 射线或辐射照射下产生酸的化合物和卤素基溶剂,其中卤素基溶剂的含量相对于组合物的总 质量为 1 ppb 至 50 ppm。