申请人:WAKO PURE CHEMICAL INDUSTRIES, LTD
公开号:EP0323050A2
公开(公告)日:1989-07-05
Photosensitive compounds having preferably a functional group such as -SO2Cl, -S03H, -SO3R,
(R, R', R" being alkyl) on a terminal benzene or naphthalene ring connected via a methylene group and
moiety are improved in sensitivity to light and thermal stability, and thus useful in a photo resist.
光敏化合物最好具有一个官能团,如 -SO2Cl、-S03H、-SO3R、
(R、R'、R "为烷基)的光敏化合物,其末端苯环或萘环上通过亚甲基和
这些官能团对光的敏感性和热稳定性都有所提高,因此可用于光阻。