Compositions for forming a protective film against basic aqueous hydrogen peroxide solution, and pattern formation method
申请人:NISSAN CHEMICAL CORPORATION
公开号:US11003078B2
公开(公告)日:2021-05-11
A composition for forming a protective film against basic aqueous hydrogen peroxide solution, including a crosslinker having, in one molecule, two or more groups at least one selected from the group consisting of a glycidyl group, a terminal epoxy group, an epoxycyclopentyl group, an epoxycyclohexyl group, an oxetanyl group, a vinyl ether group, an isocyanate group, and a blocked isocyanate, a compound having a group of Formula (1):
(wherein X1 is a substituent reacting with the crosslinker, R0 is a direct bond or a C1-2 alkylene group, X2 is a C1-2 alkyl group, C1-2 alkoxy group, or fluoro group, a is an integer of 0-2, b is an integer of 1-3, c is an integer of 0-4, and b and c satisfy a relational expression of 1≤(b+c)≤5) on a side chain or a terminal and having a weight average molecular weight of 800 or more, and an organic solvent.
一种用于形成针对碱性过氧化氢水溶液的保护膜的组合物,包括一种交联剂,该交联剂在一个分子中具有两个或两个以上的基团,其中至少一个基团选自缩水甘油基、末端环氧基、环氧环戊基、环氧环己基、氧杂环戊基、乙烯基醚基、异氰酸酯基和封端异氰酸酯组成的组,该化合物具有式(1)的基团:
(其中 X1 是与交联剂反应的取代基,R0 是直接键或 C1-2 亚烷基,X2 是 C1-2 烷基、C1-2 烷氧基或氟基团,a 是 0-2 的整数,b 是 1-3 的整数,c 是 0-4 的整数,且 b 和 c 满足 1≤(b+c)≤5 的关系式)的侧链或末端,且其重量平均分子量大于或等于 800,以及一种有机溶剂。