negative‐type low‐molecular‐weight fluorinatedphotoresists (NFPs) were prepared by composing of fluorinated polystyrene derivates (FPSDs), diphenyl iodonium salt as a photoacid generator (PAG) and solvent. The polymer films prepared from NFP by photocuring exhibited excellent chemical resistance and thermal stabilities (Td ranged from 230.5 to 258.1 °C). A clear negative pattern was obtained through direct