COMPOSITION FOR FORMING ORGANIC ANTI-REFLECTIVE COATING LAYER SUITABLE FOR NEGATIVE TONE DEVELOPMENT
申请人:DONGJIN SEMICHEM CO., LTD.
公开号:US20170351178A1
公开(公告)日:2017-12-07
Provided is a composition for forming an organic anti-reflective coating layer used in a negative tone development, which not only enhance an adhesion to a photoresist while having a high refractive index and a high etch rate but also improve a pattern profile of undercut etc. The composition an isocyanurate compound containing at least one moiety which is represented by Formula 2; a polymer represented by Formula 3 and an organic solvent for dissolving the above-mentioned components.
Seo, SungYong; Yu, Xianghua; Marks, Tobin J., Journal of the American Chemical Society, 2009, vol. 131, p. 263 - 276