4-tert-amyloxyphenyl methacrylate | 1351230-43-7

• 分子结构分类: 有机化合物 - 苯类化合物 - 苯酚酯
• 英文名称: 4-tert-amyloxyphenyl methacrylate
• 英文别名: [4-(2-Methylbutan-2-yloxy)phenyl] 2-methylprop-2-enoate
• CAS: 1351230-43-7
• 化学式: C₁₅H₂₀O₃
• 分子量: 248.322
• InChiKey: VGYXKBKNBJOPHR-UHFFFAOYSA-N

计算性质

• 辛醇/水分配系数(LogP)：
  4.1
• 重原子数：
  18
• 可旋转键数：
  6
• 环数：
  1.0
• sp3杂化的碳原子比例：
  0.4
• 拓扑面积：
  35.5
• 氢给体数：
  0
• 氢受体数：
  3

反应信息

• 作为产物：
  描述：

  甲基丙烯酰氯 在 三乙胺 作用下， 以 水 、 乙腈 为溶剂， 以77%的产率得到4-tert-amyloxyphenyl methacrylate
  参考文献：
  名称：

  MONOMER, POLYMER, CHEMICALLY AMPLIFIED POSITIVE RESIST COMPOSITION, AND PATTERNING PROCESS

  摘要：

  一种聚合物是由一种具有酸敏感基团的羟基苯甲酸甲酯单体合成得到的。该聚合物作为基础树脂的正性光阻组合物具有极高的曝光前后碱溶解速率对比度、高分辨率、曝光后图案的良好轮廓和极小的线边粗糙度、缓慢的酸扩散速率和良好的蚀刻抗性。

  公开号：

  US20110294070A1

文献信息

• RESIST COMPOSITION AND PATTERNING PROCESS
  申请人：SHIN-ETSU CHEMICAL CO., LTD.

  公开号：US20200218154A1

  公开（公告）日：2020-07-09

  The present invention is a resist composition comprises a polymer compound having one or two repeating units selected from repeating units represented by the following general formulae (p-1), (p-2) and (p-3), a repeating unit represented by the following formula (a-1) and the formula (a-2) polarities of which are changed by an action of an acid, and a repeating unit represented by the following formula (b-1); a salt represented by the following general formula (B); and a solvent, wherein a difference of a C log P of the repeating unit (a-1) before and after changing the polarity is 3.0 to 4.5, and a difference of a C log P of the repeating unit (a-2) before and after changing the polarity is 2.5 to 3.2. This provides a resist composition which has high sensitivity, wide DOF and high resolution, reduces LER, LWR and CDU, and has good pattern shape after exposure and excellent etching resistance.
• US9017918B2
  申请人：——

  公开号：US9017918B2

  公开（公告）日：2015-04-28