RADIATION-SENSITIVE RESIN COMPOSITION, METHOD FOR FORMING RESIST PATTERN, ORGANIC ACID AND ACID GENERATING AGENT
申请人:MATSUDA Yasuhiko
公开号:US20130065186A1
公开(公告)日:2013-03-14
A radiation-sensitive resin composition includes an acid generating agent to generate an organic acid by irradiation with a radioactive ray. The organic acid has a cyclic hydrocarbon group and an organic group including a bond that is cleavable by an acid or a base to produce a polar group. The organic acid is preferably represented by a following formula (I). Z represents an organic acid group. R
2
represents an alkanediyl group, wherein a part or all of hydrogen atoms of the alkanediyl group represented by R
1
are optionally substituted by a fluorine atom. X represents a single bond, O, OCO, COO, CO, SO
3
or SO
2
. R
2
represents a cyclic hydrocarbon group. R
3
represents a monovalent organic group having a functional group represented by a following formula (x). n is an integer of 1 to 3.
Z—R
1
—X—R
2
—(R
3
)
n
(I)
—R
31
-G-R
13
(x)
一种辐射敏感树脂组合物包括酸发生剂,通过放射性射线照射生成有机酸。该有机酸具有环烃基和有机基,包括可被酸或碱裂解以产生极性基团的键。有机酸最好由以下式(I)表示。其中,Z代表有机酸基团。R2代表脂肪二元基,其中R1代表脂肪二元基中的一部分或全部氢原子可选地被氟原子取代。X代表单键,O,OCO,COO,CO,SO3或SO2。R2代表环烃基。R3代表具有以下式(x)所表示的官能团的一价有机基。n为1到3的整数。Z-R1-X-R2-(R3)n(I)-R31-G-R13(x)。