申请人:MORTON INTERNATIONAL, INC.
公开号:EP0614121A1
公开(公告)日:1994-09-07
A positive working deep UV sensitive photoresist which provides improved critical dimension stability during prolonged periods of post exposure delay before baking comprises an acid stable polymer which is insoluble in water but normally soluble in an aqueous alkaline medium, a photo acid generator exemplified by the tri-(2,1,4-diazonaphthoquinonesulfonate) ester of 3,5-dinitro-2,6-dimethylol para cresol, and a mixed carbonate ester of tertiary butyl alcohol and a polyhydric phenol which is an acid labile compound which inhibits the dissolution of the normally soluble polymer in said alkaline medium.
一种正向工作深度紫外线敏感光致抗蚀剂可在烘烤前的长时间曝光后延迟期间提供更好的临界尺寸稳定性,它包括一种不溶于水但通常可溶于水性碱性介质的酸稳定聚合物、一种光酸发生器,例如 3-(2.A.)-1,4-二氮杂萘醌磺酸酯和 3,5-二硝基-2,6-二甲醇对甲酚的混合碳酸酯、3,5-二硝基-2,6-二甲醇对甲酚的三(2,1,4-二氮杂萘醌磺酸盐)酯,以及叔丁醇和多水酚的混合碳酸酯,后者是一种酸性化合物,可抑制通常可溶解的聚合物在所述碱性介质中的溶解。