申请人:Zahn Wolfgang
公开号:US20090253073A1
公开(公告)日:2009-10-08
A compound of the formula (I)
where the symbols and indices are each defined as follows:
A is A′, R or O—R; where R is a straight-chain, branched or cyclic, saturated or unsaturated aliphatic radical having 1-8 carbon atoms;
A′ is the same or different and is
B is a bond, —O—C(O)—, —C(O)—O—, —O—C(O)—, —C(O)—NH—, —NH—C(O)—, —C(O)—O—CH
2
—CH(OH)—CH
2
—O, —O—CH
2
—CH(OH)—CH
2
—O—(O)C—, —O—C(O)—O—, —O—C(O)—NH— or —NH—C(O)—O—;
R
1
is H or OH;
m is 1, 2, 3, 4 or 5;
Y is
n is a positive rational number ≧3;
E is the same or different and is —CH—CHR
2
—, —CHR
2
—CH
2
—, —CH
2
—CHR
2
—O—, —O—CHR
2
—CH
2
—, —(CH
2
)
r
—O— or —O—(CH
2
)—;
R
2
is H or CH
3
and
r is 1 or 4,
is suitable as a light-sensitive component for photoresists.