Novel N-alkyl substituted perhydridocyclic silazanes, oligomeric N-alkyl perhydridosilazane compounds, and N-alkylaminodihydridohalosilanes, and a method for their synthesis are provided. The novel compounds may be used to form high silicon nitride content films by thermal or plasma induced decomposition.
提供了新型的N-烷基取代的过氢化环状
硅氮烷、寡聚N-烷基过
氢化硅氮烷化合物以及N-烷基
氨基双氢卤代
硅烷化合物及其合成方法。这些新型化合物可以通过热分解或等离子体诱导分解形成高
硅氮含量的薄膜。