(METH)ACRYLATE DERIVATIVE, INTERMEDIATE THEREOF, AND POLYMER COMPOUND
申请人:Sato Junko
公开号:US20100331508A1
公开(公告)日:2010-12-30
Provided are a polymerizable compound shown below which is useful as a raw material for a polymer having less swelling in developing, a polymer obtained by polymerizing a raw material containing the above polymerizable compound, a photoresist composition which contains the above polymer and which is improved in LWR and an efficient production process for the polymerizable compound described above:
wherein n represents an integer of 0 to 2; R
1
represents a hydrogen atom, methyl or trifluoromethyl; R
2
, R
3
, R
4
, R
5
, R
6
, R
7
, R
8
, R
9
and R
10
represent a hydrogen atom, an alkyl group having 1 to 6 carbon atoms or the like; W represents an alkylene group having 1 to 10 carbon atoms or the like; and Y
1
and Y
2
represent an oxygen atom or a sulfur atom.
US8314258B2
申请人:——
公开号:US8314258B2
公开(公告)日:2012-11-20
US8492562B2
申请人:——
公开号:US8492562B2
公开(公告)日:2013-07-23
US8546587B2
申请人:——
公开号:US8546587B2
公开(公告)日:2013-10-01
[EN] (METH)ACRYLATE DERIVATIVE, INTERMEDIATE THEREOF, AND POLYMER COMPOUND<br/>[FR] DÉRIVÉ (MÉTH)ACRYLATE, SON INTERMÉDIAIRE ET COMPOSÉ POLYMÈRE