Method for manufacturing metal line contact plugs for semiconductor devices
申请人:——
公开号:US20040009655A1
公开(公告)日:2004-01-15
A method for manufacturing a metal line contact plug of a semiconductor device is disclosed. A stable landing plug poly is formed by etching an interlayer insulating film by using a CMP (chemical mechanical polishing) slurry for an oxide film that includes an alkyl ammonium salt having a high affinity to the oxide film without damaging the hard mask nitride film.