(AMIDE AMINO ALKANE) METAL COMPOUND, METHOD OF MANUFACTURING METAL-CONTAINING THIN FILM USING SAID METAL COMPOUND
申请人:Fujimura Osamu
公开号:US20130273250A1
公开(公告)日:2013-10-17
The present invention relates to an (amide amino alkane) metal compound represented by the formula (1):
wherein
M represents a metal atom;
R
1
represents a linear, branched or cyclic alkyl group having 1 to 6 carbon atoms;
R
2
and R
3
may be the same as, or different from each other, and each independently represents a linear or branched alkyl group having 1 to 3 carbon atoms, or R
2
and R
3
may form a substituted or unsubstituted 5- or 6-membered ring together with the nitrogen atom to which they are bound;
Z represents a linear or branched alkylene group having 1 to 10 carbon atoms (a part of which may optionally form a ring); and
n represents a number of the ligands, which is equal to the valence of the metal (M), and represents an integer of from 1 to 3;
with the proviso that
the metal compounds in which M is Li (Lithium), Be (Beryllium), Ge (Germanium) or Nd (Neodymium) are excluded;
the metal compounds in which M is Mg (Magnesium) and R
1
is methyl group are excluded;
the metal compounds in which M is Zn (Zinc) and R
1
is methyl group are excluded;
the metal compounds in which M is Bi (Bismuth) and R
1
is t-butyl group are excluded; and
in cases where n is two or greater, two or more ligands may be the same as, or different from each other;
and a method of producing a metal-containing thin film using the metal compound.
本发明涉及一种由式(1)表示的(酰胺氨基烷)金属化合物:其中,M代表金属原子;R1代表具有1至6个碳原子的线性、支链或环烷基;R2和R3可以相同,也可以不同,每个独立地表示具有1至3个碳原子的线性或支链烷基,或者R2和R3可以与它们所连接的氮原子一起形成取代或未取代的5-或6-成员环;Z代表具有1至10个碳原子的线性或支链亚烷基(其中的一部分可以选择地形成环);n代表配体的数量,其等于金属(M)的价,表示为1至3的整数。但是,M为锂(Li)、铍(Be)、锗(Ge)或钕(Nd)的金属化合物被排除;M为镁(Mg)且R1为甲基基团的金属化合物被排除;M为锌(Zn)且R1为甲基基团的金属化合物被排除;M为铋(Bi)且R1为叔丁基基团的金属化合物被排除;在n为2或更大的情况下,两个或更多的配体可以相同或不同;以及使用该金属化合物制备含金属薄膜的方法。