COMPOUND, RESIN, COMPOSITION, RESIST PATTERN FORMATION METHOD, AND CIRCUIT PATTERN FORMATION METHOD
申请人:Mitsubishi Gas Chemical Company, Inc.
公开号:US20190010108A1
公开(公告)日:2019-01-10
The present invention employs a compound represented by the following formula (0):
wherein R
Y
is a linear, branched, or cyclic alkyl group of 1 to 30 carbon atoms or an aryl group of 6 to 30 carbon atoms;
R
Z
is an N-valent group of 1 to 60 carbon atoms or a single bond;
each R
T
is independently an alkyl group of 1 to 30 carbon atoms optionally having a substituent, an aryl group of 6 to 40 carbon atoms optionally having a substituent, an alkenyl group of 2 to 30 carbon atoms optionally having a substituent, an alkoxy group of 1 to 30 carbon atoms optionally having a substituent, a halogen atom, a nitro group, an amino group, a cyano group, a thiol group, a hydroxy group, or a group in which a hydrogen atom of a hydroxy group is replaced with an acid dissociation group, wherein the alkyl group, the alkenyl group, and the aryl group each optionally contain an ether bond, a ketone bond, or an ester bond, wherein at least one R
T
is a hydroxy group or a group in which a hydrogen atom of a hydroxy group is replaced with an acid dissociation group;
X is an oxygen atom, a sulfur atom, or not a crosslink; each m is independently an integer of 0 to 9, wherein at least one m is an integer of 1 to 9;
N is an integer of 1 to 4, wherein when N is an integer of 2 or larger, N structural formulas within the parentheses [ ] are the same or different; and
each r is independently an integer of 0 to 2.
本发明采用以下式(0)所代表的化合物:其中RY是1到30个碳原子的直链、支链或环烷基基团,或者是6到30个碳原子的芳基基团;RZ是1到60个碳原子的N价基团或者是一个单键;每个RT独立地是1到30个碳原子的烷基基团,可选地带有取代基,是6到40个碳原子的芳基基团,可选地带有取代基,是2到30个碳原子的烯基基团,可选地带有取代基,是1到30个碳原子的烷氧基基团,可选地带有取代基,是卤素原子、硝基基团、氨基基团、氰基基团、硫醇基团、羟基或者羟基的氢原子被酸解离基团取代的基团,其中烷基基团、烯基基团和芳基基团每个可选地包含醚键、酮键或酯键,其中至少一个RT是羟基或者羟基的氢原子被酸解离基团取代的基团;X是氧原子、硫原子或者不是交联;每个m独立地是0到9的整数,其中至少一个m是1到9的整数;N是1到4的整数,当N是2或更大的整数时,括号中的N个结构式是相同或不同的;每个r独立地是0到2的整数。