There is described the use of a protic ionic liquid comprising a trialkylammonium salt as a solvent.
这里描述了一种包含三烷基铵盐的质子离子液体作为溶剂的使用。
Salt suitable for an acid generator and a chemically amplified resist composition containing the same
申请人:Harada Yukako
公开号:US20070078269A1
公开(公告)日:2007-04-05
The present invention provides a salt of the formula (I):
wherein ring Y represents monocyclic or polycyclic hydrocarbon group having 3 to 30 carbon atoms, in which one —CH
2
— group is substituted with —COO— group, and at least one hydrogen atom in the monocyclic or polycyclic hydrocarbon group may optionally be substituted with alkyl group having 1 to 6 carbon atom, alkoxy group having 1 to 6 carbon atom, perfluoroalkyl group having 1 to 4 carbon atoms, hydroxyalkyl group having 1 to 6 carbon atoms, hydroxyl group or cyano group; Q
1
and Q
2
each independently represent fluorine atom or perfluoroalkyl group having 1 to 6 carbon atoms; A
+
represents organic counter ion; and n shows an integer of 0 to 12.
The present invention also provides a chemically amplified resist composition comprising the salt of the formula (I).
SALT AND PHOTORESIST COMPOSITION CONTAINING THE SAME
申请人:ICHIKAWA Koji
公开号:US20100304294A1
公开(公告)日:2010-12-02
A salt represented by the formula (I-AA):
wherein Q
1
and Q
2
each independently represent a fluorine atom or a C1-C4 perfluoroalkyl group,
X
1
represents a single bond etc.,
Y
1
represents a C1-C36 aliphatic hydrocarbon group etc.,
A
1
and A
2
independently each represents a C1-C20 aliphatic hydrocarbon group etc.,
Ar
1
represents a (m
4
+1)-valent C6-C20 aromatic hydrocarbon group which can have one or more substituents,
B
1
represents a single bond etc.,
m
1
and m
2
independently each represents an integer of 0 to 2, m
3
represents an integer of 1 to 3, with the proviso that m
1
plus m
2
plus m
3
equals 3, and m
4
represents an integer of 1 to 3, and a photoresist composition comprising the salt represented by the formula (I-AA) and a resin comprising a structural unit having an acid-labile group and being insoluble or poorly soluble in an aqueous alkali solution but becoming soluble in an aqueous alkali solution by the action of an acid.
A salt represented by the formula (I0):
wherein Q
1
and Q
2
each independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, L
1
represents a divalent C1-C17 hydrocarbon group in which one or more —CH
2
— can be replaced by —O— or —CO—, m represents 1 or 2, and Z
m+
represents m-valent organic or inorganic cation.
BIS(6-METHYL-3-SULPHOPHENYL)PHENYLPHOSPHINE, AMMONIUM SALT THEREOF, AND METHOD FOR PRODUCING SAME
申请人:HOKKO CHEMICAL INDUSTRY CO., LTD.
公开号:US20160052947A1
公开(公告)日:2016-02-25
Provided are a water-soluble triarylphosphine for a palladium catalyst, which has high selectivity in a telomerization reaction and can be recovered with efficiency, an ammonium salt thereof, and a method for efficiently producing the same. Specifically, provided are bis(6-methyl-3-sulphophenyl)phenylphosphine; a bis(6-methyl-3-sulphonatophenyl)phenylphosphine diammonium salt obtained by reacting the phosphine with a tertiary amine having a total of 3 to 27 carbon atoms in groups bonded to one nitrogen atom; and a method for producing the same.