[EN] LOW MODULUS NEGATIVE TONE, AQUEOUS DEVELOPABLE PHOTORESIST<br/>[FR] PHOTORÉSINE DÉVELOPPABLE AQUEUSE, À FAIBLE MODULE, À TON NÉGATIF
申请人:DESIGNER MOLECULES INC
公开号:WO2014081894A1
公开(公告)日:2014-05-30
Hydrophobic, low modulus, photoimagable, functionalized polyimides have been discovered that can be developed using aqueous solutions. In particular, compositions containing the functionalized polyimides of the current invention can be used in the photolithography step for the passivation layer on a silicon wafer to reduce stress in thin wafers, or as a low modulus hydrophobic solder mask. These materials can serve as protective layers in other applications in which a thin, flexible, and hydrophobic polymer is required.