Disclosed are a negative resist composition which shows excellent sensitivity and resolution in pattern formation by exposure to electron beams or EUV, a novel crosslinking agent suitable for the resist composition, and a pattern forming method using the resist composition.
The negative resist composition comprises: (A) a polyphenol compound comprising two or more phenolic hydroxyl groups in a molecule thereof and having a molecular weight of 300 to 3,000, (B) an acid generator which directly or indirectly produces acid by exposure to active energy rays having a wavelength of 248 nm or less, and (C) a crosslinking agent represented by the following chemical formula (1).
(The symbols shown in the formula (1) are defined in the Description).
本发明涉及一种负型光阻组合物,通过暴露于电子束或极紫外线下表现出优异的感光性和分辨率,以及适用于该光阻组合物的新型
交联剂和使用该光阻组合物的图案形成方法。该负型光阻组合物包括:(A)一种聚
酚化合物,其分子中包含两个或更多
酚羟基,并且分子量为300至3,000,(B)一种酸发生剂,通过暴露于波长为248nm或更短的活性能量射线而直接或间接产生酸,以及(C)一种由以下
化学式(1)表示的
交联剂。(
化学式(1)中所示的符号在说明中有定义)。