申请人:JSR Corporation
公开号:EP1897869A1
公开(公告)日:2008-03-12
A radiation-sensitive resin composition is provided which has high transparency to radiation, excelling in basic properties as a resist such as sensitivity, resolution, and pattern shape, and, in particular, a high resolution radiation-sensitive resin composition providing a wide DOF and excelling in LER. Also provided are a polymer which can be used in the composition and a novel compound useful for synthesizing the polymer. The novel compound is shown by the following formula (2),
wherein R4 represents a methyl group, a trifluoromethyl group, or a hydrogen atom, at least one of the Rfs represents a fluorine atom or a linear or branched perfluoroalkyl group having 1 to 10 carbon atoms, A represents a divalent organic group or a single bond, G represents a divalent organic group having a fluorine atom or a single bond, Mm+ represents a metal ion or an onium cation, m represents an integer of 1 to 3, and p is an integer of 1 to 8.
本发明提供了一种辐射敏感树脂组合物,该组合物对辐射具有高透明度,在灵敏度、分辨率和图案形状等抗蚀剂基本特性方面表现出色,尤其是一种高分辨率辐射敏感树脂组合物,可提供宽 DOF 并在 LER 方面表现出色。此外,还提供了一种可用于该组合物的聚合物和一种可用于合成该聚合物的新型化合物。新型化合物如下式(2)所示、
其中 R4 代表甲基、三氟甲基或氢原子,Rfs 中至少有一个代表氟原子或具有 1 至 10 个碳原子的直链或支链全氟烷基,A 代表二价有机基团或单键,G 代表具有氟原子或单键的二价有机基团,Mm+ 代表金属离子或鎓阳离子,m 代表 1 至 3 的整数,p 为 1 至 8 的整数。