申请人:ADVANCED TECHNOLOGY MATERIALS, INC.
公开号:EP1975987A2
公开(公告)日:2008-10-01
Removal compositions and processes for removing at least one material layer from a rejected microelectronic device structure having same thereon. The removal composition includes hydrofluoric acid. The composition achieves substantial removal of the material(s) to be removed while not damaging the layers to be retained, for reclaiming, reworking, recycling and/or reuse of said structure.
用于从被剔除的微电子器件结构上去除至少一层材料层的去除组合物和工艺。去除组合物包括氢氟酸。该组合物可大量去除待去除的材料,同时不损坏待保留的材料层,以便对所述结构进行回收、再加工、再循环和/或再利用。