Fluorinated vinyl ethers are provided having the structure of formula (I) the structure of formula (I)
wherein at least one of X and Y is a fluorine atom, and L, R
1
, R
2
, R
3
, R
4
are as defined herein. Also provided are copolymers prepared by radical polymerization of (I) and a second monomer that may not be fluorinated. The polymers are useful in lithographic photoresist compositions, particularly chemical amplification resists. In a preferred embodiment, the polymers are substantially transparent to deep ultraviolet (DUV) radiation, and are thus useful in DUV lithographic photoresist compositions. A method for using the composition to generate resist images on a substrate is also provided, i.e., in the manufacture of integrated circuits or the like.
提供具有结构式(I)的
氟化乙烯醚,其中结构式(I)中的X和Y中至少有一个是
氟原子,而L、R1、R2、R3、R4如本文所定义。还提供由(I)和可能不是
氟化的第二单体进行自由基聚合制备的共聚物。这些聚合物在光刻光阻组合物中很有用,特别是
化学放大光阻。在一个首选实施例中,这些聚合物对深紫外(DUV)辐射几乎透明,因此在DUV光刻光阻组合物中很有用。还提供一种使用该组合物在基板上生成抗蚀图像的方法,即在集成电路或类似产品的制造中。