申请人:Makabe Yoshie
公开号:US20120130117A1
公开(公告)日:2012-05-24
Disclosed is a photo-acid generator having high developing properties, a cationic polymerization initiator having high curing properties, and a resist composition and a cationically polymerizable composition containing the photo-acid generator and the cationic polymerization initiator, respectively. Specifically, disclosed is an aromatic sulfonium salt compound of general formula (I) and a photo-acid generator, a cationic polymerization initiator, a resist composition, and a cationically polymerizable composition containing the compound.
In formula (I), R
1
to R
19
are each hydrogen, halogen, hydroxyl, optionally hydroxyl-substituted C1-C18 alkyl, optionally hydroxyl-substituted C1-C18 alkoxy, optionally hydroxyl-substituted C1-C18 thioalkoxy, etc.; An
−
is a monovalent anion; at least one of R
1
to R
19
is a substituent selected from the group consisting of hydroxyl, hydroxyl-substituted C1-C12 ester group, hydroxyl-substituted C1-C18 alkoxy, and hydroxyl-substituted C1-C18 thioalkoxy.
本发明涉及一种具有高显影性能的光酸发生剂,具有高固化性能的阳离子聚合引发剂,以及包含光酸发生剂和阳离子聚合引发剂的抗蚀剂组合物和阳离子聚合组合物。具体地,本发明涉及一种通式(I)的芳香基磺酸盐化合物和光酸发生剂、阳离子聚合引发剂、抗蚀剂组合物和阳离子聚合组合物,其中化合物的R1至R19分别为氢、卤素、羟基、可选的羟基取代的C1-C18烷基、可选的羟基取代的C1-C18烷氧基、可选的羟基取代的C1-C18硫代烷氧基等;An−是一价阴离子;R1至R19中至少有一个是从羟基、羟基取代的C1-C12酯基、羟基取代的C1-C18烷氧基和羟基取代的C1-C18硫代烷氧基组成的取代基。