CHEMICAL VAPOR DEPOSITION RAW MATERIAL INCLUDING DINUCLEAR RUTHENIUM COMPLEX AND CHEMICAL DEPOSITION METHOD USING CHEMICAL VAPOR DEPOSITION RAW MATERIAL
CHEMICAL VAPOR DEPOSITION RAW MATERIAL INCLUDING DINUCLEAR RUTHENIUM COMPLEX AND CHEMICAL DEPOSITION METHOD USING CHEMICAL VAPOR DEPOSITION RAW MATERIAL
申请人:TANAKA KIKINZOKU KOGYO K.K.
公开号:US20180201636A1
公开(公告)日:2018-07-19
The present invention relates to a chemical vapor deposition raw material for producing a ruthenium thin film or a ruthenium compound thin film by a chemical deposition method, the chemical vapor deposition raw material including a dinuclear ruthenium complex in which carbonyl and a nitrogen-containing organic ligand (L) are coordinated to metallically bonded two rutheniums, the dinuclear ruthenium complex being represented by the following formula (
1
): A raw material according to the present invention is capable of producing a high-purity ruthenium thin film, and has a low melting point and moderate thermal stability. Thus, the raw material according to the present invention is suitable for use in electrodes of various kinds of devices.