There is disclosed a sulfonium salt shown by the following general formula (1). There can be a sulfonium salt capable of introducing an acid-generating unit generating an acid having an appropriate acid strength and not impairing adhesion with a substrate into a base polymer; a polymer using the said sulfonium salt; a chemically amplified resist composition using the said polymer as a base polymer; and a patterning process using the said chemically amplified resist composition.
公开了一种由以下一般式(1)所示的
硫銨鹽。可以有一种
硫銨鹽,能夠將一個能夠生成具有適當酸度並不損害與基材的粘附性的酸的酸生成單元引入到基聚合物中;使用所述
硫銨鹽的聚合物;使用所述聚合物作為基聚合物的化學放大的抗蝕組成物;以及使用所述化學放大的抗蝕組成物的圖案形成過程。