Composition for film formation, film, resist underlayer film-forming method, production method of patterned substrate, and compound
申请人:JSR CORPORATION
公开号:US11003079B2
公开(公告)日:2021-05-11
The composition for film formation includes a compound including a group of the formula (1) and a solvent. In the formula (1), R1 to R4 each independently represent a hydrogen atom, a monovalent organic group having 1 to 20 carbon atoms, or R1 to R4 taken together represent a cyclic structure having 3 to 20 ring atoms together with the carbon atom or a carbon chain to which R1 to R4 bond. Ar1 represents a group obtained by removing (n+3) hydrogen atoms from an aromatic ring of an arene having 6 to 20 carbon atoms. n is an integer of 0 to 9. R5 represents a hydroxy group, a halogen atom, a nitro group, or a monovalent organic group having 1 to 20 carbon atoms.
用于成膜的组合物包括一种包括式(1)基团的化合物和一种溶剂。在式 (1) 中,R1 至 R4 各自独立地代表氢原子、具有 1 至 20 个碳原子的一价有机基团,或 R1 至 R4 合在一起代表具有 3 至 20 个环原子的环状结构以及 R1 至 R4 所键合的碳原子或碳链。Ar1 代表通过从具有 6 至 20 个碳原子的芳香环中移除 (n+3) 个氢原子而得到的基团,n 为 0 至 9 的整数。R5 代表羟基、卤素原子、硝基或具有 1 至 20 个碳原子的一价有机基团。