申请人:TOKYO OHKA KOGYO CO., LTD.
公开号:US11204551B2
公开(公告)日:2021-12-21
A resist composition containing a resin component having a structural unit represented by general formula (a0-1), and a compound represented by general formula (b1). In general formula (a0-1), R is a hydrogen atom, an alkyl group, or a halogenated alkyl group, Va1 is a divalent hydrocarbon group, na1 represents an integer of 0 to 2, Ya0 is a carbon atom, Xa0 is a group forming a monocyclic aliphatic hydrocarbon group together with Ya0, and Ra00 is an aromatic hydrocarbon group or a specific unsaturated hydrocarbon group. In general formula (b1), Rb1 represents a cyclic hydrocarbon group, Yb1 represents a divalent linking group containing an ester bond, Vb1 represents an alkylene group, a fluorinated alkylene group, or a single bond, and Mm+ is an m-valent organic cation.
一种抗蚀剂组合物,含有具有通式(a0-1)表示的结构单元的树脂组分和通式(b1)表示的化合物。在通式(a0-1)中,R 是氢原子、烷基或卤代烷基,Va1 是二价烃基,na1 代表 0 至 2 的整数,Ya0 是碳原子,Xa0 是与 Ya0 一起形成单环脂肪族烃基的基团,Ra00 是芳香族烃基或特定的不饱和烃基。通式(b1)中,Rb1 代表环状烃基,Yb1 代表含有酯键的二价连接基团,Vb1 代表亚烷基、氟化亚烷基或单键,Mm+ 是 m 价有机阳离子。