申请人:ASAHI KASEI KABUSHIKI KAISHA
公开号:US11163234B2
公开(公告)日:2021-11-02
A negative-type photosensitive resin composition that has a satisfactory imidization rate and can yield a resin layer with high chemical resistance, even under low-temperature curing conditions of 200° C. or below, the negative-type photosensitive resin composition containing a photopolymerization initiator (B) in a proportion of 0.1 part by mass to 20 parts by mass with respect to 100 parts by mass of a polyimide precursor (A), the polyimide precursor (A) being a polyamic acid ester or polyamic acid salt with a specific structure, and the weight-average molecular weight (Mw) of the polyimide precursor (A) being 3,000 or greater and less than 16,000, in terms of polystyrene, according to gel permeation chromatography (GPC).
一种负型感光树脂组合物,该组合物具有令人满意的亚胺化率,即使在 200°C 或以下的低温固化条件下也能生成具有高耐化学腐蚀性的树脂层,该负型感光树脂组合物含有光聚合引发剂 (B),其与聚酰亚胺前体 (A) 的质量比为 0.相对于 100 份聚酰亚胺前体(A)而言,聚酰亚胺前体(A)的质量为 1 份至 20 份,聚酰亚胺前体(A)为具有特定结构的聚酰胺酸酯或聚酰胺酸盐,根据凝胶渗透色谱法(GPC),聚酰亚胺前体(A)的重量平均分子量(Mw)为 3,000 或更大且小于 16,000 (以聚苯乙烯计)。