Bis(3,4-methylenedioxyphenylamino) derivatives and electrophotographic photoreceptor containing the derivatives
申请人:Takasago International Corporation
公开号:US06228547B1
公开(公告)日:2001-05-08
Disclosed are novel compounds useful in electrophotographic photoreceptors as charge-transporting materials having good miscibility with binder polymers and capable of forming a thin stable organic film having a high concentration; and an electrophotographic photoreceptor containing the same. The compounds are bis(3,4-methylenedioxyphenylamino) derivatives represented by general formula (1):
wherein Ar1 and Ar2 each is an optionally substituted aryl group and Ar3 is a phenylene group or an optionally substituted biphenylene group.
COATING-TYPE COMPOSITION FOR FORMING ORIGINAL FILM, PATTERNING PROCESS, POLYMER, AND METHOD FOR MANUFACTURING POLYMER
申请人:Shin-Etsu Chemical Co., Ltd.
公开号:EP3876035A1
公开(公告)日:2021-09-08
The present invention provides a coating-type composition for forming an organic film containing: a polymer having a structure shown by the following general formula (1) as a partial structure; and an organic solvent, where in the formula (1), ring structures Ar1 and Ar2 represent a benzene ring or a naphthalene ring optionally having a substituent, and W1 represents an aryl group having 6 to 30 carbon atoms and optionally having a substituent. This provides a coating-type composition for forming an organic film that can form an organic film having high patterncurving resistance and high dry-etching resistance, the composition being excellent in solvent solubility and having a low generation of defects.
Polymer and composition for forming organic film, substrate for manufacturing semiconductor apparatus, method for forming organic film, and patterning process
申请人:SHIN-ETSU CHEMICAL CO., LTD.
公开号:US10998197B2
公开(公告)日:2021-05-04
The invention provides a composition for forming an organic film, which generates no by-product even under such a film formation condition in an inert gas to prevent substrate corrosion, which is capable of forming an organic film not only excellent in properties of filling and planarizing a pattern formed on a substrate but also favorable for dry etching resistance during substrate processing, and further which causes no fluctuation in film thickness of the film due to thermal decomposition even when a CVD hard mask is formed on the organic film. The composition for forming an organic film includes (A) a polymer having a repeating unit shown by the following general formula (1) and (B) an organic solvent.