Fluorine-free photoacid generators and photoresist compositions containing fluorine-free photoacid generators are enabled as alternatives to PFOS/PFAS photoacid generator-containing photoresists. The photoacid generators are characterized by the presence of a fluorine-free heteroaromatic sulfonate anionic component. The photoacid generators preferably contain an onium cationic component, more preferably a sulfonium cationic component. The photoresist compositions preferably contain an acid sensitive imaging polymer. The compositions are especially useful for forming material patterns using 193nm (ArF) imaging radiation.
不含
氟的光酸发生剂和含有不含
氟光酸发生剂的光阻组合物作为PFOS/PFAS光酸发生剂含有光阻的替代品。这些光酸发生剂的特点是含有不含
氟的杂环
磺酸盐阴离子成分。光酸发生剂最好包含一个离子阳离子成分,更好地是一个磺
酚阳离子成分。光阻组合物最好包含酸敏感成像聚合物。这些组合物在利用193nm(ArF)成像辐射形成材料图案方面特别有用。