Richeson, Darrin S.; Mitchell, John F.; Theopold, Organometallics, 1989, vol. 8, # 11, p. 2570 - 2577
作者:Richeson, Darrin S.、Mitchell, John F.、Theopold
DOI:——
日期:——
Nonfluorinated Volatile Copper(I) 1,3-Diketiminates as Precursors for Cu Metal Deposition via Atomic Layer Deposition
作者:Kyung-Ho Park、Alexander Z. Bradley、Jeffery S. Thompson、Will J. Marshall
DOI:10.1021/ic061016e
日期:2006.10.1
Novel nonfluorinated Cu(diketiminate) L complexes with L = neutral olefinic ligand have been prepared as stable, volatile Cu( I) precursors for the deposition of copper films by an atomic layer deposition (ALD) process. Among them, the complexes of 4-a and 5-a are the most volatile and stable at low temperature (55 degrees C). A clean, conformal copper film was deposited at 120 degrees C in an ALD process. These Cu(I) complexes are the first examples of nonfluorinated copper(I) diketiminates that can be readily applied to an industrial microelectronic fabrication process.