申请人:Hitachi Chemical Company, Ltd.
公开号:EP1223609A1
公开(公告)日:2002-07-17
This invention provides a polishing medium for CMP, comprising an oxidizing agent, a metal-oxide-dissolving agent, a protective-film-forming agent, a water-soluble polymer, and water, and a polishing method making use of this polishing medium. Also, it is preferable that the water-soluble polymer has a weight-average molecular weight of 500 or more and the polishing medium has a coefficient of kinetic friction of 0.25 or more, a Ubbelode's viscosity of from 0.95 cP to 1.5 cP and a point-of-inflection pressure of 50 gf/cm2.
本发明提供了一种用于 CMP 的抛光介质,它由氧化剂、金属氧化物溶解剂、保护膜形成剂、水溶性聚合物和水组成,并提供了一种利用这种抛光介质的抛光方法。此外,水溶性聚合物的重量平均分子量最好为 500 或以上,抛光介质的动摩擦系数最好为 0.25 或以上,乌贝洛德粘度最好为 0.95 cP 至 1.5 cP,反射点压力最好为 50 gf/cm2。