A method for manufacturing a metal line contact plug of a semiconductor device is disclosed. A stable landing plug poly is formed by etching an interlayer insulating film by using a CMP (chemical mechanical polishing) slurry for an oxide film that includes an alkyl ammonium salt having a high affinity to the oxide film without damaging the hard mask nitride film.
本发明公开了一种制造半导体器件
金属线接触插头的方法。通过对氧化膜使用
CMP(
化学机械抛光)浆料蚀刻层间绝缘膜,形成稳定的着陆插头聚合物,该浆料包括对氧化膜具有高亲和力的烷基
铵盐,而不会损坏硬掩膜氮化膜。